Ultraviolet optical and microstructural properties of MgF_2 and LaF_3 coatings deposited by ion-beam sputtering and boat and electron-beam evaporation
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چکیده
منابع مشابه
Ultraviolet optical and microstructural properties of MgF2 and LaF3 coatings deposited by ion-beam sputtering and boat and electron-beam evaporation.
Single layers of MgF2 and LaF3 were deposited upon superpolished fused-silica and CaF2 substrates by ion-beam sputtering (IBS) as well as by boat and electron beam (e-beam) evaporation and were characterized by a variety of complementary analytical techniques. Besides undergoing photometric and ellipsometric inspection, the samples were investigated at 193 and 633 nm by an optical scatter measu...
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چکیده ندارد.
15 صفحه اولMechanical Properties and Microstructural Evolution of Ta/TaNx Double Layer Thin Films Deposited by Magnetron Sputtering
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ژورنال
عنوان ژورنال: Applied Optics
سال: 2002
ISSN: 0003-6935,1539-4522
DOI: 10.1364/ao.41.003196